Transmission Electron Microscope
AssigneeCarl Zeiss NTS GmbH
InventorGerd Benner
Life of this patent
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Abstract
A transmission electron microscope in which a sample is positioned in a sample plane 9b comprises an objective lens 11b, a first projection lens system 61b having plural lenses, a second projection lens 63b system having plural lenses, and an analyzing system. The sample plane 9b is imaged into an intermediate image plane 71, a diffraction plane 15b of the objective lens 11b is imaged into an intermediate diffraction plane 67b, and either a) the intermediate image plane is imaged into an entrance image plane of the analyzing system and the intermediate diffraction plane is imaged into an entrance pupil plane of the analyzing system, or b) the intermediate image plane 71 is imaged into the entrance pupil plane 65b and the intermediate diffraction plane 67b is imaged into the entrance image plane 21b.
Claims38
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Transmission electron microscope in which a sample can be positioned in a sample plane, wherein the microscope comprises:
- an objective lens positioned downstream of the sample plane in the beam path of the microscope;
- a first projection lens system having plural lenses positioned downstream of the objective lens in the beam path;
- a second projection lens system having plural lenses positioned downstream of the first projection lens system in the beam path;
- and
- an analyzing system including at least one lens positioned downstream of the second projection lens system in the beam path;
- wherein the objective lens, the first and second projection lens systems and the analyzing system are configured
- such that the sample plane is imaged into an intermediate image plane by the objective lens and the first projection lens system,
- such that a diffraction plane of the objective lens is imaged into an intermediate diffraction plane by the first projection lens system, and
- such that either
- a) the intermediate image plane is imaged into an entrance image plane of the analyzing system and the intermediate diffraction plane is imaged into an entrance pupil plane of the analyzing system by the second projection lens system, or
- b) the intermediate image plane is imaged into the entrance pupil plane of the analyzing system and the intermediate diffraction plane is imaged into the entrance image plane of the analyzing system by the second projection lens system.
Dependencies are inferred from the claim text.