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AssigneeHitachi High-Technologies Corporation
InventorsKotoko HIROSE, Takeshi KAWASAKI, Haruo YODA, Tomonori NAKANO
Estimating the term…
A method for estimation of a probe shape, in a scanning electron microscope provided with an aberration corrector, and the method is designed so as to obtain a probe image, by inputting to a computer an image taken in a just-focused state and an image taken in a de-focused state, as an image data; preparing a correlation window by automatically determining a size of a correlation window image, based on an input data size and an output data size; executing cross-correlation calculation between the correlation window and a reference area; and repeating this calculation while shifting the reference area, so as to obtain a cross-correlation matrix, in order to stably obtain the probe image, without receiving effects of use conditions or noises.
(canceled)
A charged particle beam instrument comprising an aberration corrector provided with a charged particle beam to output the secondary particles as secondary particle signals by irradiating an aberration corrected convergent charged particle beam onto a specimen, and
Dependencies are inferred from the claim text.