Method and system for determining depth profiling
AssigneeYeda Research and Development Co. Ltd.
InventorHagai COHEN
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Abstract
The present invention relates to a novel system and method for the determination of depth profiling with improved accuracy and reliability. The method comprises obtaining spectroscopic data from the sample while under at least two different electrical conditions of the sample, the spectroscopic data comprising a signal of charged particles emitted from the sample, and being indicative of a change in amplitude, spectral position and spectral shape of the signal from the sample while under different electrical conditions of the sample, the change being indicative of the compositional profile and spatial distribution for at least one chemical element in the sample along a direction through the sample.
Claims30
A method for examining a sample, the method comprising:
- obtaining spectroscopic data from the sample having multiple materials while under at least two different electrical conditions of the sample, said spectroscopic data comprising a first spectroscopic data being quantified-type data indicative of an amplitude change of a photoelectron signal from the sample with a change in the electrical condition of the sample and being thus indicative of a material compositional profile of the sample along a direction perpendicular to a surface of the sample;
- and second spectroscopic data being indicative of change in spectral line shifts and shape distortion with a change in the electrical condition of the sample and thus indicative of spatial distribution of chemical elements in the sample along said direction;
- combining the results of the two spectroscopic data;
- and generating measured data of the compositional profile and spatial distribution being indicative of inhomogeneity of the compositional profile and spatial distribution for at least one chemical element in the sample along said direction.
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A method for examining a sample, the method comprising:
- applying XPS based measurements to the sample at different electrical conditions of the sample, thereby obtaining spectroscopic data from the sample indicative of a change in a photoelectron signal from the sample, of spectral line shift and shape distortions;
- analyzing the spectroscopic data and generating measured data indicative of a material compositional profile of the sample and spatial distribution of chemical elements in the sample along a direction across the sample, the measured data being thereby indicative of compositional and quantitative distribution variations of a predetermined chemical element in the sample along the direction across the sample.
A system for examining a sample, the system comprising:
- an excitation source producing high-energy radiation to cause emission of internal charged particles from the sample;
- an electronic device associated with the sample for affecting an electrical condition of the sample;
- an analyzer unit including a charged particles' spectrometer and a detector unit connected to the output of the spectrometer;
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- a control system configured and operable to operate the electronic device to vary electrical condition of the sample and to receive measured data from the analyzer unit and determine changes in a signal intensity, spectral line shift and spectral line shape distortion from the sample, thereby identifying spatial distribution of chemical elements in the sample along a direction across the sample.
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Dependencies are inferred from the claim text.