Process for producing substrate having patterned conductive polymer film and substrate having patterned conductive polymer film
OwnerTakashi Iharainventor
Life of this patent
Estimating the term…
Loading patent…
OwnerTakashi Iharainventor
Estimating the term…
A process for producing a substrate having a patterned conductive polymer film is provided in which stripping properties are excellent, and discoloration of an end part of the conductive polymer film when a resist film is stripped from the conductive polymer film is suppressed. The process for producing a substrate having a patterned conductive polymer film includes in sequence a step of forming a substrate having in order above the substrate a conductive polymer film and a patterned resist film, a step of etching the conductive polymer film in accordance with the resist film pattern, and a step of stripping the resist film above the conductive polymer film by means of a stripping liquid, the stripping liquid containing an organic solvent (A) at 5 to 40 wt % selected from the group consisting of an N-alkylpyrrolidone, a carboxylic acid amide compound, a dialkyl sulfoxide, and an ether compound and an organic solvent (B) at 60 to 95 wt % selected from the group consisting of an alkyrolactone, an alkylene carbonate, and a polyhydric alcohol.
1-9. (canceled)
A process for producing a substrate having a patterned conductive polymer film, comprising in sequence:
Dependencies are inferred from the claim text.