Thermally resistant spacers for a submicron gap thermo-photo-voltaic device and method
AssigneeThe Charles Stark Draper Laboratory, Inc.
InventorPaul Greiff
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Abstract
A micron gap thermo-photo-voltaic device including a photovoltaic substrate, a heat source substrate, and a plurality of spacers separating the photovoltaic substrate from the heat source substrate by a submicron gap. Each spacer includes an elongated thin-walled structure disposed in a well formed in the heat source substrate and having a top surface less than a micron above the heat source substrate. Also disclosed are methods of making the spacers.
Claims33
A micron gap thermo-photo-voltaic device comprising:
- a photovoltaic substrate;
- a heat source substrate;
- and
- a plurality of spacers separating the photovoltaic substrate from the heat source substrate by a submicron gap, each spacer comprising:
- an elongated thin-walled structure disposed in a well formed in the heat source substrate and having a top surface less than a micron above the heat source substrate.
A method of making a spacer separating a photovoltaic substrate from a heat source by a submicron gap, the method comprising:
- forming a well in the heat source substrate;
- growing or depositing a thermally resistant material on the surface of the well;
- and
- enlarging the well to form an elongated thin-walled structure disposed in the well having a top surface less than a micron above the heat source substrate.
A device comprising:
- a first substrate;
- a second substrate;
- a plurality of spacers separating the first substrate from the second substrate by a gap, each spacer comprising:
- an elongated thin-walled structure disposed in a well formed in one of the first and second substrates and having a top surface above said substrate.
A method of making a spacer separating a first substrate from a second substrate, the method comprising:
- forming a well in one said substrate;
- growing or depositing a thermally resistant material on the surface of the well;
- and
- enlarging the well to form an elongated thin-walled structure disposed in the well having a top surface above said substrate.
Dependencies are inferred from the claim text.