Silicon heating furnace
AssigneeTeoss Co., Ltd.
InventorsTsuyoshi Murai, Toshinori Konaka
Life of this patent
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AssigneeTeoss Co., Ltd.
InventorsTsuyoshi Murai, Toshinori Konaka
Estimating the term…
The silicon heating furnace is constructed by combining two semi-cylindrical furnaces. Each of the semi-cylindrical furnaces has a semi-cylindrical housing, an insulator, heaters, and an isothermal material. Radial direction separation preventing members are arranged in inner side of both ends of circumferential direction of the housing to prevent a separation of the insulator to radial direction. End face of circumferential direction covers are fixed on the radial direction separation preventing members to cover the end faces of circumferential direction of the insulator. Cooling pipes for end faces of circumferential direction through which cooling water passed are arranged between the end faces of circumferential direction of the insulator and the end face of circumferential direction covers.
1-5. (canceled)
A silicon heating furnace having a heating chamber for containing raw material silicon to be heated, comprising:
Dependencies are inferred from the claim text.