Method for measuring a concentration of a compound in a liquid stream
AssigneeSiemens Water Technologies Corp.
InventorBruce Lee Coulter
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Abstract
A method and system of providing ultrapure water for semiconductor fabrication operations is provided. The water is treated by utilizing a free radical scavenging system and a free radical removal system. The free radical scavenging system can utilize actinic radiation with a free radical precursor compound, such as ammonium persulfate. The free radical removal system can comprise use of a reducing agent. The ultrapure water may be further treated by utilizing ion exchange media and degasification apparatus. A control system can be utilized to regulate addition of the precursor compound, the intensity of the actinic radiation, and addition of the reducing agent to the water.
Claims9
A method for measuring a concentration of a compound in a liquid stream comprising:
- measuring a first conductivity of the liquid stream;
- irradiating the liquid stream;
- measuring a second conductivity of the liquid stream after irradiating;
- and
- calculating the concentration of the compound in the liquid stream based in part on the first conductivity measurement and the second conductivity measurement.
Dependencies are inferred from the claim text.