Fused silica article loaded with deuterium and method of making
AssigneeCorning Incorporated
InventorsMichael A. Mueller, Michael Thomas Murtagh
Life of this patent
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Abstract
A method of making a fused silica article having a combined concentration of protium and deuterium in a range from about 1×1016 molecules/cm3 up to about 6×1019 molecules/cm3. In some embodiments, deuterium is present in an amount greater than its natural isotopic abundance. The method includes the steps of providing a fused silica boule, diffusing at least one of protium and deuterium into the boule, and annealing the boule to form the fused silica article. A method of diffusing hydrogen into fused silica and a fused silica article loaded with hydrogen formed by the method are also described.
Claims21
1-6. (canceled)
A method of making a fused silica article, the method comprising the steps of:
- a. providing a fused silica boule, wherein the fused silica boule has been consolidated, and wherein the fused silica boule has a concentration of hydroxyl groups of less than about 100 ppm by weight;
- b. diffusing the deuterium into the fused silica boule at a predetermined temperature, wherein the deuterium is present in an amount that is greater than its natural isotopic abundance;
- and
- c. annealing the fused silica boule after diffusing the deuterium into the fused silica boule at a predetermined annealing temperature to form the fused silica article, wherein the fused silica article has a combined concentration of protium and deuterium in a range from about 1×1016 molecules/cm3 up to about 6×1019 molecules/cm3, and wherein deuterium is present in a concentration that is greater than its natural isotopic abundance.
A method of making a fused silica article, the method comprising the steps of:
- a. providing a fused silica boule, wherein the fused silica boule has been consolidated, and wherein the fused silica boule has a concentration of hydroxyl groups of less than about 100 ppm by weight;
- b. exposing the fused silica boule to at least one pulse of a first deuterium pressure, wherein each pulse has a predetermined duration time, and wherein the deuterium pressure is greater than ambient pressure,
- c. exposing the fused silica boule to a second deuterium pressure immediately after each pulse for a second duration time, wherein the second deuterium pressure is less than the first deuterium pressure;
- and
- d. annealing the fused silica boule after diffusing the deuterium at a predetermined annealing temperature to form the fused silica article, wherein the fused silica article has a combined concentration of protium and deuterium in a range from about 1×1016 molecules/cm3 up to about 6×1019 molecules/cm3, and wherein deuterium is present in the fused silica article in a concentration that is great than its natural isotopic abundance.
Dependencies are inferred from the claim text.