Method and apparatus for thin film quality control
OwnerMoshe Finarov, David Scheiner +2inventors
InventorsMoshe Finarov, David Scheiner, Yoav Lishzinker, On Haran
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OwnerMoshe Finarov, David Scheiner +2inventors
InventorsMoshe Finarov, David Scheiner, Yoav Lishzinker, On Haran
Estimating the term…
Photovoltaic thin film quality control is obtained where the thin film is supported by a support and a section of the film is illuminated by a polychromatic or monochromatic illumination source. The illumination is positioned in certain locations including locations where the layer stack includes a reduced number of thin film layers. Such locations may be discrete sampled points located within scribe lines, contact frames or dedicated measurement targets. The light collected from such discrete sampled points is transferred to a photo-sensitive sensor through an optical switch. The spectral signal of the light reflected, transmitted or scattered by the sampled points is collected by the sensor and processed by a controller in such a way that parameters of simplified stacks are used for accurate determination of desired parameters of the full cell stack. In this way the photovoltaic thin film parameters applicable to the quality control are derived e.g. thin film thickness, index of refraction, extinction coefficient, absorption coefficient, energy gap, conductivity, crystallinity, surface roughness, crystal phase, material composition and photoluminescence spectrum and intensity. Manufacturing equipment parameters influencing the material properties may be changed to provide a uniform thin film layer with pre-defined properties.
A method for accurate determination of parameters of a stack of thin films of a photovoltaic panel, said method comprising:
A method of a photovoltaic thin film quality control, said method comprising:
A method of a photovoltaic panel quality control, said method comprising:
An apparatus for determination of thin films stack parameters, said apparatus comprising:
An apparatus for accurate measurement of a stack of thin films parameters, said apparatus comprising:
A method of scribe line location detection, said method comprising:
A method of a photovoltaic thin film quality control, said method comprising:
A method of a photovoltaic thin film quality control, said method comprising:
Dependencies are inferred from the claim text.