Tool identifying method and apparatus
AssigneeFujitsu Limited
InventorYuzi Kanazawa
Life of this patent
Estimating the term…
Abstract
A method includes generating Atool(j, i) representing an effect of a tool j for a chip i by using outputs from M kinds of tools that carries out a processing for design support for layout data of N kinds of chips; calculating a difference ε(i) between an actual parameter value of the chip i, which is stored in an actual value storage storing, for each chip, the actual parameter value, and an estimated parameter value of the chip i, which is an estimated value of the parameter value calculated from data for the chip i and stored in an estimated value storage storing, for each chip, the parameter estimate value, and calculating, for each chips i, an influence degree Xtool(j) of each tool j, which satisfies ε(i)=ΣAtool(j, i)*Xtool(j); and identifying a tool j whose influence degree Xtool(j) is largest.
Claims6
A non-transitory computer-readable storage medium storing a tool identifying program to execute a process, said process comprising:
- generating a coefficient Atool(j, i) representing an effect of a tool j for a semiconductor chip i by using outputs from M kinds of tools that carries out a processing for design support for layout data of N kinds of semiconductor chips;
- calculating a difference ε(i) between an actual parameter value of said semiconductor chip i, which is stored in an actual parameter value storage device storing, for each of said N kinds of semiconductor chips, said actual parameter value, and an estimated parameter value of said semiconductor chip i, which is an estimated value of said parameter value calculated from data for said semiconductor chip i and stored in an estimated parameter value storage device storing, for each of said N kinds of semiconductor chips, said estimated parameter value;
- calculating, for each of said semiconductor chips i, an influence degree Xtool(i) of each tool j, which satisfies ε(i)=ΣAtool(j, i)*Xtool(j);
- and
- identifying a tool j whose influence degree Xtool(i) is largest.
A tool identifying method, comprising:
- generating a coefficient Atool(j, i) representing an effect of a tool j for a semiconductor chip i by using outputs from M kinds of tools that carries out a processing for design support for layout data of N kinds of semiconductor chips;
- calculating a difference ε(i) between an actual parameter value of said semiconductor chip i, which is stored in an actual parameter value storage device storing, for each of said N kinds of semiconductor chips, said actual parameter value, and an estimated parameter value of said semiconductor chip i, which is an estimated value of said parameter value calculated from data for said semiconductor chip i and stored in an estimated parameter value storage device storing, for each of said N kinds of semiconductor chips, said estimated parameter value;
- calculating, for each of said semiconductor chips i, an influence degree Xtool(j) of each tool j, which satisfies ε(i)=ΣAtool(j, i)*Xtool(j);
- and
- identifying a tool j whose influence degree Xtool(j) is largest.
A tool identifying apparatus, comprising:
- a storage device;
- a coefficient generator to generate a coefficient Atool(j, i) representing an effect of a tool j for a semiconductor chip i by using outputs from M kinds of tools that carries out a processing for design support for layout data of N kinds of semiconductor chips, and to store said coefficient Atool(j, i) into said storage device;
- an influence degree calculation unit to calculate a difference ε(i) between an actual parameter value of said semiconductor chip i, which is stored in an actual parameter value storage device storing, for each of said N kinds of semiconductor chips, said actual parameter value, and an estimated parameter value of said semiconductor chip i, which is an estimated value of said parameter value calculated from data for said semiconductor chip i and stored in an estimated parameter value storage device storing, for each of said N kinds of semiconductor chips, said estimated parameter value, and to calculate, for each of said semiconductor chips i, an influence degree Xtool(j) of each tool j, which satisfies ε(i)=ΣAtool(j, i)*Xtool(j);
- and
- an output unit to identify a tool j whose influence degree Xtool(j) is largest.
A tool identifying apparatus, comprising:
- a memory configured to store, for each of N kinds of semiconductor chips, an actual parameter value and an estimated parameter value, which is an estimated value of a parameter value;
- and
- a processor configured to execute a procedure, the procedure comprising:
- generating a coefficient Atool(j, i) representing an effect of a tool j for a semiconductor chip i by using outputs from M kinds of tools that carries out a processing for design support for layout data of said N kinds of semiconductor chips, and to store said coefficient Atool(j, i) into said memory;
- calculating a difference ε(i) between an actual parameter value of said semiconductor chip i, which is stored in said memory, and an estimated parameter value of said semiconductor chip i, which is stored in said memory, and to calculate, for each of said semiconductor chips i, an influence degree Xtool(j) of each tool j, which satisfies ε(i)=ΣAtool(j, i)*Xtool(j);
- and
- identifying a tool j whose influence degree Xtool(j) is largest.
Dependencies are inferred from the claim text.