Imide complex, method for producing the same, metal-containing thin film and method for producing the same

A method for producing an imide complex represented by the general formula (1):

• [Chem. 4]
• M1(NR1)(OR2)3 (1)
• (wherein M1, R1 and R2 are the same as defined below) which comprises reacting a compound represented by the general formula (2):
• [Chem. 2]
• M1(NR1)X3(L)r (2)
• (wherein M1 represents niobium atom or tantalum atom, R1 represents an alkyl group having from 1 to 12 carbon atoms, X represents halogen atom, L represents 1,2-dimethoxyethane ligand or pyridine ligand, r is 1 when L is 1,2-dimethoxyethane ligand, and r is 2 when L is pyridine ligand), and
• an alkali metal alkoxide represented by the general formula (3):
• [Chem. 3]
• R2OM2 (3)
• (wherein R2 represents an alkyl group having from 2 to 13 carbon atoms, and M2 represents an alkali metal).

A method for producing an imide complex represented by the general formula (1):

• [Chem. 7]
• M1(NR1)(OR2)3 (1)
• (wherein M1, R1 and R2 are the same as defined below) which comprises reacting a compound represented by the general formula (4):
• [Chem. 5]
• M1(NR1)(NR3R4)3 (4)
• (wherein M1 represents niobium atom or tantalum atom, R1 represents an alkyl group having from 1 to 12 carbon atoms, and R3 and R4 each independently represent methyl group or ethyl group), and
• an alcohol represented by the general formula (5):
• [Chem. 6]
• R2OH (5)
• (wherein R2 is an alkyl group having from 2 to 13 carbon atoms).

A method for producing an imide complex represented by the general formula (1):

• [Chem. 12]
• M1(NR1)(OR2)3 (1)
• (wherein M1, R1 and R2 are the same as defined below) which comprises reacting a compound represented by the general formula (1a):
• [Chem. 10]
• M1(NR1a)(OR2)3 (1a)
• (wherein M1 represents niobium atom or tantalum atom, R1a represents tert-butyl group or isopropyl group, and R2 represents an alkyl group having from 2 to 13 carbon atoms), and
• an amine represented by the general formula (7):
• [Chem. 11]
• R1NH2 (7)
• (wherein R1 represents an alkyl group having from 1 to 12 carbon atoms, provided that R1 and R1a are not simultaneously the same group).

A method for producing an imide complex represented by the general formula (1):

• [Chem. 16]
• M1(NR1)(OR2)3 (1)
• (wherein M1, R1 and R2 are the same as defined below) which comprises reacting a metal halide represented by the general formula (8):
• [Chem. 13]
• M1Y5 (8)
• (wherein M1 represents niobium atom or a tantalum atom, and Y represents halogen atom),
• an alkali metal alkoxide represented by the general formula (3):
• [Chem. 14]
• R2OM2 (3)
• (wherein R2 represents an alkyl group having from 2 to 13 carbon atoms, and M2 represents an alkali metal), and lithium amide represented by the general formula (9):
• [Chem. 15]
• R1NHLi (9)
• (wherein R1 represents an alkyl group having from 1 to 12 carbon atoms).