Method for fabricating oxide-confined vertical-cavity surface-emitting laser
AssigneeTrueLight Corporation
InventorsJin Shan Pan, Cheng Ju Wu, I Han Wu, Kuo Fong Tseng
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Abstract
The present invention discloses a method for fabricating a heat-resistant, humidity-resistant oxide-confined vertical-cavity surface-emitting laser (VCSEL) by slowing down the oxidizing rate during a VCSEL oxidation process to thereby reduce stress concentration of an oxidation layer and by preventing moisture invasion using a passivation layer disposed on a laser window. The VCSEL device thus fabricated is heat-resistant, humidity-resistant, and highly reliable. In a preferred embodiment, the oxidation process takes place at an oxidizing rate of less than 0.4 μm/min, and the passivation layer is a SiON passivation layer.
Claims8
A method for fabricating an oxide-confined vertical-cavity surface-emitting laser (VCSEL), comprising steps of:
- providing a laser substrate, the laser substrate comprising:
- a first mirror, an active layer on the first mirror, a second mirror on the active layer, an oxidation layer disposed in the second mirror, and at least one oxidation trench formed on the second mirror, wherein each said oxidation trench is deep enough to allow at least a portion of the oxidation layer to be exposed from an inner wall of the each said oxidation trench;
- performing an oxidation process on the laser substrate such that, on the inner wall of each said oxidation trench, the at least one exposed portion of the oxidation layer undergoes an oxidation reaction so as to form an insulating area, wherein a rate of the oxidation reaction is less than 0.4 μm/min;
- and
- forming at least a contact pad and at least a dielectric layer on the second mirror of the laser substrate, wherein the at least a dielectric layer comprises a SiON passivation layer above the at least one oxidation trench and the second mirror.
Dependencies are inferred from the claim text.