Method of forming thermal bend actuator with connector posts connected to drive circuitry
AssigneeSilverbrook Research Pty Ltd
InventorsGregory John McAvoy, Kia Silverbrook
Life of this patent
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Abstract
A method of forming a thermal bend actuator in an inkjet nozzle assembly. The method includes: depositing sidewalls and a roof layer to define a nozzle chamber; defining first and second vias in one sidewall to reveal first and second electrodes; filling the vias with a conductive material using electroless plating to provide first and second connector posts; depositing an active beam material onto the roof layer; etching the active beam material to define a planar active beam member comprising a bent or serpentine beam element; and etching the roof layer to define the thermal bend actuator.
Claims14
A method of forming a thermal bend actuator in an inkjet nozzle assembly, said method comprising the steps of:
- (a) providing a substrate having a layer of drive circuitry, said drive circuitry including first and second electrodes for connection to the thermal bend actuator;
- (b) depositing sidewalls and a roof layer to define a nozzle chamber, wherein a first sidewall is deposited over said first and second electrodes;
- (c) defining first and second vias in said first sidewall, said vias revealing said first and second electrodes;
- (d) filling said first and second vias with a conductive material using electroless plating to provide first and second connector posts, said first and second connector posts being adjacent each other;
- (e) depositing an active beam material onto said roof layer such that said active beam material extends from said first and second connector posts in a plane perpendicular to said posts;
- (f) etching said active beam material to define a planar active beam member comprising a bent or serpentine beam element, said beam element having a first end positioned over said first connector post and a second end positioned over said second connector post;
- and
- (g) etching said roof layer to define the thermal bend actuator, said thermal bend actuator being moveable towards said substrate upon actuation.
Dependencies are inferred from the claim text.