Positive resist composition and method for production of microlens
AssigneeNissan Chemical Industries, Ltd.
InventorsShojiro Yukawa, Takahiro Kishioka, Takahiro Sakaguchi, Hiroyuki Soda
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AssigneeNissan Chemical Industries, Ltd.
InventorsShojiro Yukawa, Takahiro Kishioka, Takahiro Sakaguchi, Hiroyuki Soda
Estimating the term…
There is provided a positive resist composition excellent in transparency, heat resistance, and refractive index particularly for forming a microlens and for forming a planarization film; and a microlens and a planarization film formed from the positive resist composition. A positive resist composition comprising a component (A): an alkali-soluble polymer comprising a unit structure having a biphenyl structure; a component (B): a compound having an organic group to be photolyzed to generate an alkali-soluble group; and a component (C): a solvent. The positive resist composition wherein the alkali-soluble polymer as the component (A) is a polymer comprising a unit structure of Formula (1): where when the total number of unit structures constituting the polymer (A) is assumed to be 1.0, the ratio n1 of the unit structure of Formula (1) constituting the polymer (A) satisfies 0.3≦n1≦1.0.
A positive resist composition comprising:
The positive resist composition according to claim 1, wherein the component (B) is a compound of Formula (8):
Dependencies are inferred from the claim text.