Hard coating layer and method for forming the same
AssigneesKabushiki Kaisha Kobe Seiko Sho, Iscar, Ltd.
InventorsKenji Yamamoto, Albir A. Layyous
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Abstract
Disclosed is a crystalline hard coating layer having no cracks, which exhibits both high hardness and excellent wear resistance at the same time. A method for forming the hard coating layer is also disclosed. A crystalline hard coating layer (3) coating a substrate (2) is formed by a PVD method, and contains Si and C as essential components, while containing an element M (which is one or more elements selected from among group 3A elements, group 4A elements, group 5A elements, group 6A elements, B, Al and Ru) and N as optional components. The crystalline hard coating layer (3) has the following composition: SixC1-x-y-zNyMz (where 0.4≦x≦0.6, 0≦y≦0.1, and 0≦z≦0.2).
Claims7
A hard coating layer which is formed by a PVD method and coats a predetermined substrate, wherein
- the hard coating layer including Si and C as essential components, and an element M and N as optional components, the element M including at least one of elements selected from among group 3A elements, group 4A elements, group 5A elements, group 6A elements, B, Al, and Ru
- the hard coating layer having a composition of SixC1-x-y-zNyMz (where 0.4≦x≦0.6, 0≦y≦0.1, and 0≦z≦0.2):
- wherein a full width of half maximum of an SiC peak observed at a diffraction angle between 34° and 36° is equal to or smaller than 3° when X-ray diffraction (XRD) is measured with a CuKα ray.
A hard coating layer which is formed by a PVD method, the hard coating layer having a structure in which at least one layer of a first coating layer and at least one layer of a second coating layer are formed alternately, the first coating layer for coating a predetermined substrate being formed on a surface of the predetermined substrate, wherein
- the first coating layer is composed of a nitride, a carbonitride, or a carbide which contains at least one element selected from among group 4A elements, group 5A elements, and group 6A elements as an essential component and at least one element selected from among group 3A elements, Si, Al, and B as an optional component, and
- the second coating layer has essential components and optional components, Si and C being the essential components, an element M and N being the optional components, the element M including at least one element selected from among group 3A elements, group 4A elements, group 5A elements, group 6A elements, B, Al, and Ru, the second coating layer having a composition of SixC1-x-y-zNyMz (where 0.4≦x≦0.6, 0≦y≦0.1, and 0≦z≦0.2) and a full width of half maximum of an SiC peak observed at a diffraction angle between 34° and 36° is equal to or smaller than 3° when X-ray diffraction is carried by using a CuKα ray.
A method of forming a hard coating layer on a surface of a predetermined substrate, the hard coating layer having a composition of SixC1-x-y-zNyMz (where 0.4≦x≦0.6, 0≦y≦0.1, and 0≦z≦0.2), where M is at least one element selected from among group 3A elements, group 4A elements, group 5A elements, group 6A elements, B, Al, and Ru;
- and
- a full width of half maximum of an SiC peak observed at a diffraction angle between 34° and 36° is equal to or smaller than 3° when X-ray diffraction is carried by using a CuKα ray, the method comprising:
- keeping the substrate at a predetermined temperature between 400° C. and 800° C., and a predetermined bias voltage of −30V to −300V being applied to the substrate, the predetermined bias voltage being maintained;
- and
- forming the hard coating layer on the surface of the substrate by a PVD method.
Dependencies are inferred from the claim text.