Substrate cartridge, substrate processing apparatus, substrate processing system, control apparatus, and method of manufacturing display element
AssigneeNikon Corporation
InventorTohru KIUCHI
Life of this patent
Estimating the term…
Abstract
In order to provide a substrate cartridge, a substrate processing apparatus, a substrate processing system, a control apparatus, and a method of manufacturing a display element capable of preventing foreign objects from being attached to the substrate, there is provided a substrate cartridge including: a cartridge mainframe that has an opening which a substrate is carried in/out and accommodates the substrate through the opening; a mount portion that is provided in the cartridge mainframe and is detachably connected to an external connecting portion; and a blocking unit that blocks the opening depending on a connection state between the mount portion and an external connecting portion.
Claims77
A substrate cartridge comprising:
- a cartridge mainframe that has an opening which a substrate is carried in/out and accommodates the substrate through the opening;
- a mount portion that is provided in the cartridge mainframe and is detachably connected to an external connecting portion;
- and
- a blocking unit that blocks the opening depending on a connection state between the mount portion and an external connecting portion.
A substrate cartridge comprising:
- a cartridge mainframe that has an opening which a substrate is carried in/out and accommodates the substrate through the opening;
- and
- a mount portion that is provided in the cartridge mainframe and is detachably connected to an external connecting portion,
- wherein the opening is provided to be blocked by the substrate depending on a connection state between the mount portion and the external connecting portion.
Dependencies are inferred from the claim text.