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US 2011/0085773 A1Published application
Optical waveguide and method of forming the same
AssigneeElectronics and Telecommunications Research Institute
InventorMin-su KIM
Life of this patent
Estimating the term…
Abstract
Provided is an optical waveguide and a method of forming the same. The optical waveguide comprises inductive thin films and a waveguide thin film. The inductive thin films are disposed to be separated from each other. The waveguide thin film fills a gap which separates the inductive thin films, and covers at least one portion of the inductive thin films. A refractive index of the waveguide thin film is greater than refractive indexes of the inductive thin films.
Claims20
An optical waveguide, comprising:
- inductive thin films disposed to be separated from each other;
- and
- a waveguide thin film filling a gap which separates the inductive thin films, and covering at least one portion of the inductive thin films,
- wherein a refractive index of the waveguide thin film is greater than refractive indexes of the inductive thin films.
1 more element
A method of forming optical waveguide, the method comprising:
- forming a first waveguide thin film;
- forming inductive thin films which are separated from each other on the first waveguide thin film;
- and
- forming a second waveguide thin film which fills a gap separating the inductive thin films and covers the inductive thin films.
1 more element
Dependencies are inferred from the claim text.