Method for studying the surface composition of planar structures
AssigneePlfinger Systems GmbH
InventorsBernhard Zagar, Florian Maier
Life of this patent
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Abstract
The invention relates to a method for studying the surface composition of planar structures (1), wherein specific surface areas are first heated continuously in a controlled way by a heat source (2), which is moved along the surface, and a temperature measurement is performed after a predetermined time, in order to determine the cooling behavior. High precision can be achieved in that the surface areas which are heated by the heat source (2) are detected at multiple moments by a thermal imaging camera (3), in order to prepare a temperature profile of individual surface points. Furthermore, the present invention relates to a device for performing the method.
Claims7
A method for examining the surface composition of planar structures (1), in which specific surface areas are first heated continuously in a controlled way by a heat source (2) and temperature measurements are performed after a predetermined time in order to determine the cooling behavior, in that the surface areas which are heated by the heat source (2) are detected at multiple moments by a thermal imaging camera (3) in order to prepare a temperature profile of individual surface points, wherein the heat source is moved with a movement speed v over the surface, the thermal imaging camera (3) covers a length area of length s in the direction of movement, the time interval for performing the measurements with the thermal imaging camera (3) is t0 in each case, and further the time interval to is less than 10%, preferably less than 5%, of the ratio of length s to the speed of movement v, i.e.
- t0<0.1·s/v,
- preferably
- t0<0.05·s/v.
An apparatus for examining the surface composition of planar structures (1), comprising a heat source (2) and a measuring device (3) arranged as a thermal imaging camera (3) for detecting the surface temperature of the structure (1) which is connected with the device for moving the heat source (2) and which is arranged to repeatedly perform measurements of areas of the surface which are subjected to the heat source (2), including a device for moving the heat source (2) along the surface of the structure in order to cover several measuring areas, with the respective measuring areas overlapping, and the thermal imaging camera (3) has a refresh rate (frate) which is determined in such a way that the time interval for performing the measurements with the thermal imaging camera (3) is t0 in each case, and further the time interval t0 is less than 10%, preferably less than 5%, of the ratio of the length s to the speed of movement v, i.e.
- t0<0.1·s/v,
- preferably
- t0<0.05·s/v.
Dependencies are inferred from the claim text.