Optical scanning device, image forming apparatus, and image projection device
AssigneeRicoh Company, Ltd.
InventorEiji MOCHIZUKI
Life of this patent
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Abstract
An optical scanning device includes a substrate, a frame, a torsion beam, and a cantilever. The substrate has a three-layer structure including an oxide film sandwiched between two silicon substrates. The torsion beam swingably supports a mirror portion which deflects a light beam projected from a light source. The cantilever is supported by the frame to connect to the torsion beam and applies torque to the torsion beam. The cantilever and the torsion beam are formed on the same silicon substrate. The cantilever has a thickness substantially thinner than the thickness of the torsion beam. An image forming apparatus includes the optical scanning device. An image projection device includes the optical scanning device.
Claims5
An optical scanning device, comprising:
- a substrate having a three-layer structure including an oxide film sandwiched between two silicon substrates;
- a frame;
- a torsion beam to swingably support a mirror portion, the mirror portion deflecting a light beam projected from a light source;
- and
- a cantilever supported by the frame, to connect to the torsion beam and apply torque to the torsion beam, the cantilever and the torsion beam formed on the same silicon substrate, the cantilever having a thickness substantially thinner than the thickness of the torsion beam.
An image forming apparatus for forming an image, comprising:
- an optical scanning device;
- an image bearing member scanned by the optical scanning device to form an electrostatic latent image on a surface of the image bearing member;
- a developing device to develop the electrostatic latent image with toner to form the electrostatic latent image into a toner image also known as a visible image;
- and
- a transfer device to transfer the toner image onto a recording medium,
- the optical scanning device including
- a substrate having a three-layer structure including an oxide film sandwiched between two silicon substrates;
- a frame;
- a torsion beam to swingably support a mirror portion, the mirror portion deflecting a light beam projected from a light source;
- and
- a cantilever supported by the frame, to connect to the torsion beam and apply torque to the torsion beam, the cantilever and the torsion beam formed on the same silicon substrate, the cantilever having a thickness substantially thinner than the thickness of the torsion beam.
An image projection device for projecting an image against a projection surface, comprising:
- a light source to project light;
- an collimating optical system to form diffused light projected from the light source into substantially parallel light;
- and
- a modulator to modulate the light projected from the light source in accordance with an image signal;
- and
- an optical scanning device including
- a substrate having a three-layer structure including an oxide film sandwiched between two silicon substrates;
- a frame;
- a torsion beam to swingably support a mirror portion, the mirror portion deflecting a light beam projected from a light source;
- and
- a cantilever supported by the frame, to connect to the torsion beam and apply torque to the torsion beam, the cantilever and the torsion beam formed on the same silicon substrate, the cantilever having a thickness substantially thinner than the thickness of the torsion beam.
Dependencies are inferred from the claim text.