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US 2011/0084706 A1Published application
Eliminating inline positional errors for four-point resistance measurement
AssigneeCapres A/S
InventorTorben M. Hansen
Life of this patent
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AssigneeCapres A/S
InventorTorben M. Hansen
Estimating the term…
Calculating resistance correction factors includes contacting the arms of a four-arm probe with a test sample; selecting a first set of first and second arms and a second set of third and fourth arms; applying a first current from the first arm to the second arm of the first set; detecting a first voltage between the third and fourth arms of the second set; calculating a first resistance using the first voltage and current; selecting a third set of first and second arms including no more than one arm of the first set, and a fourth set of third and fourth arms including no more than one arm of the second set; applying a second current from the first arm to the second arm of the third set; detecting a second voltage between the third and fourth arms of the fourth set; calculating a second resistance using the second voltage and current; and calculating a correction factor using the first and second resistances.
1-6. (canceled)
A method for obtaining a characteristic electrical property of a test sample by using a probe having a body and at least four probe arms each including a probe tip, said characteristic electrical property including a resistance property, said probe arms extending parallel from said body, said probe including electrical contact points for establishing electrical contact between said probe tips and a test apparatus operable for transmitting and receiving electrical signals to and from said probe tips, said method comprising the following steps:
(canceled)
Dependencies are inferred from the claim text.