High voltage shielding arrangement
AssigneeMapper Lithography IP B.V.
InventorsJohan Joost Koning, Stijn Willem Herman Steenbrink, Norman Hendrikus Rudolf Baars, Bart Schipper
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Abstract
The invention relates to a high voltage shielding arrangement comprising a first metal part and a second metal part positioned in close vicinity to said first metal part. Said second metal part included in said arrangement to be set at an electrical potential that is lower than the electric potential of the first metal part. Said second metal part having comprising one or more edges and an insulator. The second metal part is at least partially encapsulated by the insulator facing the first metal part.
Claims10
A high voltage shielding arrangement for use in a charged particle system, comprising:
- a first metal part included in said arrangement to be set at a first electrical potential;
- a substantially thin second metal part such as a coating;
- said second metal part included in said arrangement to be set at a second electrical potential causing a relatively negative charge with respect to the first metal part;
- said second metal part positioned at a distance to said first metal part;
- said distance between said first and second metal parts defining a discharge region in which an electric field is present;
- said second metal part comprising one or more edge parts;
- and
- said arrangement further comprising an insulator characterised in that
- said one or more edge parts facing the discharge region are at least partially encapsulated by the insulator and the second metal part being included as a conductive coating.
A charged particle lithography machine including a shielding arrangement comprising:
- a first metal part included in said arrangement to be set at a first electrical potential;
- a substantially thin second metal part such as a coating;
- said second metal part included in said arrangement to be set at a second electrical potential causing a relatively negative charge with respect to the first metal part;
- said second metal part positioned at a distance to said first metal part;
- said distance between said first and second metal parts defining a discharge region in which an electric field is present;
- said second metal part comprising one or more edge parts;
- and
- said arrangement further comprising an insulator;
- wherein said one or more edge parts facing the discharge region are at least partially encapsulated by the insulator and the second metal part being included as a conductive coating.
Dependencies are inferred from the claim text.