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US 2011/0084591 A1Published application
Thermal field emission cathode
AssigneeHermes Microvision, Inc.
InventorsZhong-Wei CHEN, Juying Dou
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Abstract
A thermal field emission cathode which is employed in an electron microscope, a critical dimension examine tool, an electron beam lithograph machine, an electron beam tester and other electron beam related systems as an electron source is disclosed. Embodiments disclose changing coating shape, coating position and shorten emitter length to extend the lifetime of the field emission cathode.
Claims12
A thermal field emission cathode, comprising:
- an emitter, the emitter comprising an apex wherefrom field emission electrons are released;
- a heating filament, the heating filament being attached to the emitter for providing thermal energy to the emitter;
- a suppressor electrode, the suppressor electrode being set in a spatial neighborhood of the emitter, with the apex extending through the center bore of the suppressor electrode;
- and
- a coating material reservoir layer formed on the emitter, wherein the thickness of the coating material reservoir is equal to or less than half of the diameter of the emitter.
2 more elements
Dependencies are inferred from the claim text.