Imprint apparatus and manufacturing method of commodities
AssigneeCanon Kabushiki Kaisha
InventorNobushige KORENAGA
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Abstract
The present invention provides an imprint apparatus including a mold and a stage that holds a substrate, the imprint apparatus executing a curing process of curing a resin while the mold and the resin applied to the substrate contact and a demolding process of releasing the mold from the resin cured in the curing process, the imprint apparatus including a structure that holds the mold, a pillar that supports the structure mechanically independently from the stage through an anti-vibration mount that reduces propagation of vibration, and a force providing unit that provides, to the structure, force in an opposite direction from a direction of force generated in the structure by providing demolding force to the mold during the demolding process.
Claims5
An imprint apparatus comprising a mold and a stage that holds a substrate, the imprint apparatus executing a curing process of curing a resin while said mold and the resin applied to the substrate contact and a demolding process of releasing said mold from the resin cured in said curing process, the imprint apparatus comprising:
- a structure that holds said mold;
- a pillar that supports said structure mechanically independently from said stage through an anti-vibration mount that reduces propagation of vibration;
- and
- a force providing unit that provides, to said structure, force in an opposite direction from a direction of force generated in said structure by providing demolding force to said mold during said demolding process.
A manufacturing method of commodities comprising:
- a step of using an imprint apparatus to form a pattern of a resin on a substrate;
- and
- a step of processing the substrate with the pattern,
- the imprint apparatus comprising a mold and a stage that holds the substrate, the imprint apparatus executing a curing process of curing the resin while said mold and the resin applied to the substrate contact and a demolding process of releasing said mold from the resin cured in said curing process, the imprint apparatus comprising:
- a structure that holds said mold;
- a pillar that supports said structure mechanically independently from said stage through an anti-vibration mount that reduces propagation of vibration;
- and
- a force providing unit that provides, to said structure, force in an opposite direction from a direction of force generated in said structure by providing demolding force to said mold during said demolding process.
Dependencies are inferred from the claim text.