Semiconductor device comprising an electromagnetic waveguide
AssigneeSTMicroelectronics S.r.l.
InventorsRomain Pilard, Daniel Gloria, Frederic Gianesello, Cedric Durand
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Abstract
A semiconductor device includes a substrate. On at least one face of that substrate, integrated circuits are formed. At least one electromagnetic waveguide is also included, that waveguide including two metal plates that are placed on either side of at least one part of the thickness of the substrate and are located facing each other. Two longitudinal walls are placed facing each other and are formed by metal vias made in holes passing through the substrate in its thickness direction. The metal vias electrically connect the two metal plates.
Claims20
A semiconductor device, comprising:
- a substrate having at least one face supporting integrated circuits;
- a connection network formed above the one face;
- at least one electromagnetic waveguide, comprising:
- two conductive plates positioned facing each other on either side of at least one part of a thickness of said substrate, the integrated circuits and the conductive plate on the one face being located on different regions of the one face;
- and
- two longitudinal walls positioned facing each other and formed by pluralities of metal vias made in holes passing through the substrate in its thickness direction and extending between said conductive plates;
- at least one electrode coupled electromagnetically to the electromagnetic waveguide and further coupled electrically to the integrated circuits through the connection network.
Dependencies are inferred from the claim text.