Filament electrical discharge ion source
AssigneeExcico Group
InventorsMaxime Makarov, Marc Mestres
Life of this patent
Estimating the term…
Abstract
Filament electric discharge ion source (1) including an ionization chamber (3) provided with internal walls and configured so as to contain a gas to be ionized, filaments (13) placed in the ionization chamber (3) and a power supply (19) for applying voltage to the filaments, in which the filaments (13) are placed so as to be substantially parallel to one another and connected to the power supply (19) through the internal walls, at least one first filament being connected to the power supply through a first internal wall and at least one second filament being connected to the power supply through a second internal wall opposite the first internal wall.
Claims20
Filament electrical discharge ion source (1), comprising an ionisation chamber (3) provided with internal walls and configured so as to contain a gas that is to be ionised, filaments (13) arranged in the ionisation chamber (3), and an electrical power supply (19) to the filaments, characterised in that the filaments (13) are arranged substantially parallel to one another and connected to the power supply (19) through the internal walls, at least one first filament being connected to the power supply through a first internal wall, at least one second filament being connected to the power supply through a second internal wall opposite the first internal wall.
Dependencies are inferred from the claim text.