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AssigneeCommissariat A L'energie Atomique Et Aux Energies Alternatives
InventorsMatthieu CUEFF, Emmanuel DEFAY, François PERRUCHOT, Patrice REY
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The invention relates to a piezoelectric actuation structure including at least one strain gauge and at least one actuator produced from a stack on the surface of a substrate of at least one layer of piezoelectric material arranged between a bottom electrode layer and a top electrode layer, at least a portion of the stack forming the actuator being arranged above a cavity produced in the substrate, characterized in that the strain gauge is a piezoresistive gauge located in the top electrode layer and/or the bottom electrode layer, the layer or layers including electrode discontinuities making it possible to produce said piezoresistive gauge. The invention also relates to a method for producing such a structure.
A piezoelectric actuation structure comprising at least one strain gauge and at least one actuator produced from a stack on the surface of a substrate of at least one layer of piezoelectric material arranged between a bottom electrode layer and a top electrode layer, at least a portion of the stack forming the actuator being arranged above a cavity produced in the substrate, wherein the strain gauge is a piezoresistive gauge located in at least one of the top electrode layer and the bottom electrode layer, said layer or layers including electrode discontinuities making it possible to produce said piezoresistive gauge.
Dependencies are inferred from the claim text.