Cavity structure comprising an adhesion interface composed of getter material
AssigneeCommiss. A L'energie Atom. Et Aux Energ. Alterna.
InventorXavier BAILLIN
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AssigneeCommiss. A L'energie Atom. Et Aux Energ. Alterna.
InventorXavier BAILLIN
Estimating the term…
A structure comprising a cavity delimited by a first substrate and a second substrate attached to the first substrate by an adhesion interface, in which a first part of a first portion of a getter material forms part of the adhesion interface, and a second part of the first portion of getter material is placed in the cavity, the first portion of getter material being placed against the first substrate or the second substrate, the adhesion interface further comprising part of a second portion of a getter material thermocompressed to the first part of the first portion of getter material, said second portion of getter material being placed against the second substrate when the first portion of getter material is placed against the first substrate or placed against the first substrate when the first portion of getter material is placed against the second substrate.
A structure comprising at least one cavity delimited by at least one first substrate and at least one second substrate attached to the first substrate by means of at least one adhesion interface, in which a first part of at least one first portion of at least one getter material forms part of the adhesion interface and a second part of the first portion of getter material is placed in the cavity, the first portion of getter material being placed against the first substrate or the second substrate, the adhesion interface further comprising at least one part of a second portion of at least one getter material thermocompressed to the first part of the first portion of getter material, said second portion of getter material being placed against the second substrate when the first portion of getter material is placed against the first substrate or placed against the first substrate when the first portion of getter material is placed against the second substrate.
A method for making a structure comprising at least the steps of:
Dependencies are inferred from the claim text.