Radiation detection and a method of manufacturing a radiation detector
AssigneeKonnklije Philips Electronics N.V.
InventorsGereon Vogtmeier, Christoph Herrmann, Klaus Juergen Engel
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Abstract
The invention relates to a radiation detector (10), comprising an array of pixels (1), wherein each pixel (1) comprises a conversion layer of a semiconductor material (4) for converting incident radiation into electrical signals and wherein each pixel (1) is surrounded by a trench (3) that is at least partly filled with a barrier material that absorbs at least a part of photons generated by the incident radiation. The invention also relates to a method of manufacturing such a radiation detector (10).
Claims13
Radiation detector (10), comprising an array of pixels (1), wherein each pixel (1) comprises a conversion layer of a semiconductor material (4) for converting incident radiation into electrical signals and wherein each pixel (1) is surrounded by a trench (3) that is at least partly filled with a barrier material that absorbs at least a part of photons generated by the incident radiation.
Method of manufacturing a radiation detector (10) comprising the steps of:
- providing a substrate (4) of a semiconductor material;
- providing a trench (3) in the substrate (4);
- covering the surfaces of the trench (3) with an isolation layer (6);
- providing an array of pixels (1) on the substrate (4) wherein each pixel (1) is surrounded by the trench (3);
- at least partly filling the trench (3) with a barrier material that absorbs at least a part of photons generated by the incident radiation.
Dependencies are inferred from the claim text.