Micromechanical structure, method for manufacturing a micromechanical structure, and use of a micromechanical structure
AssigneeRobert Bosch GmbH
InventorsJohannes Classen, Christian Bierhoff
Life of this patent
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Abstract
A micromechanical structure which includes a substrate having a main plane of extension, and a seismic mass which is movable relative to the substrate. The micromechanical structure includes a fixed electrode which is connected to the substrate, and a counterelectrode which is connected to the seismic mass. The fixed electrode has a first fixed electrode region and a second fixed electrode region which is connected in an electrically conductive manner to the first fixed electrode region. The counterelectrode is partially situated between the first and the second fixed electrode region, perpendicular to the main plane of extension.
Claims20
A micromechanical structure comprising:
- a substrate having a main plane of extension and a seismic mass which is movable relative to the substrate;
- a fixed electrode which is connected to the substrate;
- and a counterelectrode which is connected to the seismic mass,
- wherein the fixed electrode includes a first fixed electrode region and a second fixed electrode region which is connected in an electrically conductive manner to the first fixed electrode region, the counterelectrode being situated, at least partially, between the first and the second fixed electrode region, perpendicular to the main plane of extension.
Dependencies are inferred from the claim text.