Shape characterization with elliptic fourier descriptor for contact or any closed structures on the chip
AssigneeGlobalfoundries Inc.
InventorsYuansheng MA, Harry J. LEVINSON, Jongwook KYE
Life of this patent
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Abstract
Shapes and orientations of contacts or other closed contours on an integrated circuit are characterized by calculating Elliptic Fourier descriptors. The descriptors are then used for generating design rules for the integrated circuit and for assessing process capability for the manufacturing of the integrated circuit. Monte Carlo simulation can be performed in conjunction with the elliptic Fourier descriptors.
Claims17
A method comprising:
- patterning a semiconductor element having a closed contour configuration;
- measuring the contour of the patterned semiconductor element to obtain a curve;
- determining low frequency components of edges of the curve and curve orientation;
- and
- reconstructing shape and orientation of the contour in accordance with the determined low frequency components.
A semiconductor device comprising at least one semiconductor element having a closed contour and one or more additional elements, the device fabricated by a method comprising:
- patterning the at least one semiconductor element;
- measuring the contour of the patterned semiconductor element to obtain a curve;
- calculating elliptic Fourier descriptors for the curve to determine low frequency components of edges of the curve and the curve orientation;
- reconstructing the contour shape and orientation;
- performing a Monte Carlo simulation in conjunction with the elliptic Fourier descriptors;
- and
- generating design rules for the at least one semiconductor element and the one or more additional elements.
A method comprising:
- lithographically patterning at least one semiconductor contact on an integrated circuit chip;
- measuring the contour of the patterned semiconductor contact to obtain a curve;
- chain coding the curve;
- performing discrete Fourier transformation on the chain coded curve to calculate elliptic Fourier descriptors for the curve, thereby determining low frequency components of the edges of the curve and the curve orientation;
- reconstructing the contour shape and orientation;
- performing a Monte Carlo simulation in conjunction with the elliptic Fourier descriptors;
- and
- generating design rules for the minimum distance between the contact and a polysilicon gate for the integrated circuit chip.
Dependencies are inferred from the claim text.