Optical Microscope
AssigneeNational University Corporation Shiozouka Universi ty
InventorsYoshimasa Kawata, Atsuo Miyakawa
Life of this patent
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Abstract
An optical microscope for optically measuring a sample (30) includes: a fluorescent thin membrane (13) which at least partly contains fluorescent substance and on which the sample (30) is placed; an electron source (11) for generating an electron beam; an electron lens (12) for focusing the electron beam generated by the electron source (11) in such a manner as to excite a minute light source having a wavelength shorter than a visible light wavelength from the fluorescent thin membrane (13) so as to irradiate the fluorescent thin membrane (13) with the electron beam, and further, scanning the focused electron beam; and an optical detector (22) for detecting a measurement light beam which is generated in the minute light source and acts on the sample (30).
Claims4
An optical microscope that optically measures an object to be measured, the optical microscope comprising:
- a fluorescent member that comprises a fluorescent substance in at least a portion thereof and on which the object to be measured is placed;
- an electron beam generating component that generates an electron beam;
- an electron beam controlling component that focuses the electron beam generated by the electron beam generating component, such that the fluorescent member is irradiated by the electron beam and a minute light source having a wavelength shorter than a visible light wavelength is excited from the fluorescent member, and that makes the focused electron beam scan;
- and
- an optical detecting component that detects a measurement light beam that is generated at the minute light source and acts on the object to be measured.
An optical microscope for optically measuring an object to be measured, the optical microscope comprising:
- a fluorescent member that comprises a fluorescent substance in at least a portion thereof and on which the object to be measured is placed;
- an electron beam generating component that generates an electron beam;
- an electron beam controlling component that controls the electron beam generated by the electron beam generating component, such that the fluorescent member is irradiated by the electron beam and a minute light source having a size smaller than a visible light wavelength is excited in the fluorescent member;
- and
- an optical detecting component that detects a measurement light beam that is generated at the minute light source and acts on the object to be measured.
Dependencies are inferred from the claim text.