Plasma generating device and method
OwnerAkira Yonesu, Nobuya Hayashiinventors
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Abstract
An object of the invention is to provide a plasma generating device and method for generating plasma through electrodeless discharge within a long tubule and carrying out a plasma process on the inside of the long tubule. The plasma generating device has a container 1 for containing a long tubule 9, the internal pressure of which can be adjusted, a magnetic field applying means 8 for applying a magnetic field in at least part of the long tubule, and a microwave supplying means 2 for emitting microwaves into the container, and is characterized in that plasma is generated within the long tubule by emitting microwaves into the container in such a state that a magnetic field is applied in at least part of the long tubule.
Claims20
A plasma generating device, comprising:
- a container for a long tubule that is open at both ends, wherein pressure inside of the long tubule is adjustable;
- a magnetic field applying means for applying a magnetic field in at least part of the long tubule;
- and
- a microwave supplying means for emitting microwaves into the container, wherein
- microwaves are emitted into the container in such a state that at least one end of the long tubule is inside the container, the pressure inside the long tubule is adjusted to a predetermined pressure that is higher than a pressure within the container, and a magnetic field is applied in at least part of the long tubule so that plasma is generated within the long tubule.
A plasma generating method, comprising:
- putting a long tubule that is open at both ends in a container;
- and
- emitting microwaves into the container in such a state that at least one end of the long tubule is inside the container, an inside of the long tubule is adjusted to a predetermined pressure that is higher than a pressure within the container, a magnetic field is applied in at least part of the long tubule, and plasma is generated inside the long tubule.
Dependencies are inferred from the claim text.