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AssigneeApplied Materials, Inc.
InventorsMarcus BENDER, Markus HANIKA, Evelyn SCHEER, Fabio PIERALISI, Guido MAHNKE
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A method is provided for coating substrates with at least one cathode assembly having a rotatable target, the rotatable target being provided with at least one magnet assembly positioned there within. The method includes providing a potential difference between the substrate and the rotatable target that is varied over time during coating. Further, the method may include positioning the magnet assembly with respect to the rotatable target so that the magnet assembly is asymmetrically aligned with respect to a plane perpendicularly extending from the substrate to the axis of the rotatable target for a predetermined first time interval. The magnet assembly is then moved to a second position that is also asymmetrically aligned. Further, a coater for coating substrates is provided including a cathode assembly with a rotatable curved target and two magnet assemblies positioned within the rotatable curved target.
A method for coating a substrate with at least one cathode assembly having a rotatable target, said rotatable target being provided with at least one magnet assembly positioned there within, said method comprising
A method for coating a substrate with at least one cathode assembly having a rotatable target, said rotatable target having at least one magnet assembly positioned there within, said method comprising
A method for coating a substrate with at least one cathode assembly having a rotatable target, said rotatable target being provided with at least one magnet assembly positioned there within, said method comprising
A coater for coating substrates comprising
Dependencies are inferred from the claim text.