Side gas injector for plasma reaction chamber
AssigneeDMS Co., Ltd.
InventorsMinshik Kim, Sungyong Ko, Hwankook Chae, Kunjoo Park, Keehyun Kim, Weonmook Lee
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Abstract
A side gas injector for a plasma reaction chamber is provided. The side gas injector includes a circular distribution plate and a cover plate. The circular distribution plate includes an injection hole for injecting a reaction gas and a distribution channel part for distributing the reaction gas such that the reaction gas introduced from the injection hole can be radially simultaneously jetted in a plurality of positions along an inner circumference surface of the distribution plate. The cover plate is coupled to a top of the distribution plate and seals a top of the distribution channel part.
Claims14
A side gas injector for a plasma reaction chamber, comprising:
- a circular distribution plate comprising an injection hole for injecting a reaction gas and a distribution channel part for distributing the reaction gas such that the reaction gas introduced from the injection hole can be radially simultaneously jetted in a plurality of positions along an inner circumference surface of the distribution plate;
- and
- a cover plate coupled to a top of the distribution plate and sealing a top of the distribution channel part.
Dependencies are inferred from the claim text.