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US 2011/0079350 A1Published application
Laser irradiation system and laser irradiation method
AssigneeSamsung Mobile Display Co., Ltd.
InventorsKyong-Taeg LEE, Hyun-Cheul Shin, Won-Woong Jung
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Abstract
A laser irradiation system includes a laser beam generator to generate laser beams, a laser beam irradiator to radiate the laser beams onto a target, a laser beam guide to detect whether one of the laser beams is reflected back toward the laser beam irradiator, a detector to convert the reflected laser beam into electrical signal data, and a controller to control the output of the laser beam generator, based on the signal data.
Claims21
A laser irradiation system comprising:
- a laser beam generator to generate laser beams;
- a laser beam irradiator to radiate the laser beams onto a target;
- a laser beam guide to capture at least one of the laser beams that are reflected back toward the laser beam irradiator;
- a detector to convert the captured laser beam into electrical signal data;
- and
- a controller to control the output of the laser beam generator, based on the signal data provided by the detector.
3 more elements
A laser irradiation method comprising:
- mounting a target on a table of a laser irradiation system;
- aligning a laser mask with the target;
- irradiating the target with laser beams, through a transmitting region of the laser mask, using a laser beam generator and a laser beam irradiator;
- detecting whether any of the laser beams is reflected from the laser mask toward the laser beam irradiator;
- interrupting the output of the laser beam generator, if the reflected laser beam has at least a preset energy level;
- and
- detecting and correcting a fault in the settings of the laser irradiation system, when the output of the laser beam generator is interrupted.
4 more elements
A laser irradiation method comprising:
- irradiating a target with laser beams, through a laser mask, using a laser beam generator and a laser beam irradiator;
- detecting whether any of the laser beams is reflected from the laser mask toward the laser beam irradiator;
- interrupting the output of the laser beam generator, if the reflected laser beam has at least a preset energy level;
- and
- detecting a fault in the relative position of the mask and the laser beam irradiator, when the output of the laser beam generator is interrupted.
2 more elements
Dependencies are inferred from the claim text.