Cleaning exhaust screens in a manufacturing process
AssigneeInternational Business Machines Corporation
InventorsJohn A. Fitzsimmons, Richard O. Henry
Life of this patent
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AssigneeInternational Business Machines Corporation
InventorsJohn A. Fitzsimmons, Richard O. Henry
Estimating the term…
A method of cleaning an screen in a manufacturing process step that employs a chamber including a drain line having a screen configured and disposed in the chamber above the drain line to trap soluble materials includes detecting a build-up of soluble material on the screen, ceasing a work operation in the chamber, and initiating a screen cleaning operation. The screen cleaning operation includes closing a computer operated valve fluidly connected to the drain line to fluidly isolate a portion of the chamber, automatically introducing an amount of solvent into the chamber once the computer operated valve is closed with the amount of solvent filling the chamber and/or the drain line to fully immerse the screen, and opening the operated valve after a predetermined amount of time to empty the chamber and the drain line of solvent once the soluble materials trapped on the screen are dissolved.
A method of cleaning a screen in a manufacturing process step that employs a chamber including a drain line having a screen configured and disposed in the chamber above the drain line to trap soluble materials, the method comprising:
A system for initiating a screen cleaning operation in a chamber including a drain line having a screen configured and disposed in the chamber above the drain line to trap soluble materials, the system comprising:
A processing tool for producing products requiring solvents to remove soluble materials and surfaces required to remain free of foreign particles, the processing tool comprising:
Dependencies are inferred from the claim text.