Substrate processing apparatus

A substrate processing apparatus, comprising:

• a substrate introduction block having a container placement portion configured to place a substrate storage container having substrates stored therein, and a transfer device configured to transfer the substrates with the substrate storage container placed on the container placement portion;
• a first processing block placed adjacent to the substrate introduction block, configured to process the substrates received from the substrate introduction block, and having a first substrate conveying device configured to convey the substrates along a straight conveying path, and a first processing unit array comprised of a plurality of processing units each configured to perform the same process with a processing liquid, where the first processing unit array is provided at both sides of the first substrate conveying device, and the substrates are conveyed to the plurality of processing units of the first processing unit array by the first substrate conveying device;
• a second processing block placed adjacent to the first processing block, configured to process the substrates received from the substrate introduction block, and having a second substrate conveying device configured to convey substrates along a straight conveying path, and a second processing unit array comprised of a plurality of processing units each configured to perform the same process as the plurality of processing units of the first processing unit, where the second processing unit array is provided at both sides of the second substrate conveying device, and the substrates are conveyed to the plurality of processing units of the second processing unit array by the second substrate conveying device;
• a first processing fluid supply system commonly provided with respect to the first processing unit array of one side at the first processing block and the second processing unit array of one side at the second processing block;
• a second processing fluid supply system commonly provided with respect to the first processing unit array of the other side at the first processing block and the second processing unit array of the other side at the second processing;
• and
• a control unit configured to process the substrates using the other processing block when one of the first and second substrate conveying devices has a trouble, and to process the substrates using the processing unit array that belongs to a processing fluid supply system having no trouble when one of the first and second processing fluid supply systems has a trouble.