Thickness measuring device, coating installation, method of measuring the thickness of a layer, and use of a thickness measuring device
AssigneeApplied Materials, Inc.
InventorsSven SCHRAMM, Philipp MAURER
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Abstract
A thickness measuring device for measuring the thickness of a layer on a substrate surface of a substrate is provided, including multiple piezoelectric crystal elements, which are arranged in an array corresponding to multiple positions on the substrate surface and which are adapted to monitor the deposition rate of a vapor to be deposited on the substrate surface.
Claims25
A thickness measuring device for measuring the thickness of a layer on a substrate surface of a substrate, comprising
- multiple piezoelectric crystal elements, which are arranged in an array corresponding to multiple positions on the substrate surface and which are adapted to monitor the deposition rate of a vapor to be deposited on the substrate surface.
A coating installation comprising a thickness measuring device for measuring the thickness of a layer on a substrate surface of a substrate, the thickness measuring device comprising
- multiple piezoelectric crystal elements, which are arranged in an array corresponding to multiple positions on the substrate surface and which are adapted to monitor the deposition rate of a vapor to be deposited on the substrate surface.
A method of measuring the thickness of a layer on a substrate surface of a substrate, comprising
- providing multiple piezoelectric crystal elements arranged in an array corresponding to multiple positions on the substrate surface,
- producing a vapor of material to be deposited on the substrate surface, and
- measuring the deposition rate of the vapor by means of the multiple piezoelectric crystal elements.
Dependencies are inferred from the claim text.