Substrate processing system, group managing apparatus, and method of analyzing abnormal state

A group managing apparatus connected to a substrate processing apparatus which is configured to operate according to a recipe defining a process sequence and process conditions, the group managing apparatus comprising:

• a storage unit configured to store readable apparatus type information for identifying a type of the substrate processing apparatus in relation to apparatus information used to identify the substrate processing apparatus for a case where an abnormal state occurs at the substrate processing apparatus, and readable check item information for specifying a check item necessary for analyzing a cause of the abnormal state in relation to the apparatus type information and abnormal state information for identifying an abnormal state occurring when the recipe is executed;
• and
• an analysis support unit configured to receive basic information comprising the abnormal state information and the apparatus information, extract check item information relating to the apparatus information by referring to the storage unit, and prepare a check item table comprising the extracted check item information.

A method of analyzing an abnormal state of a substrate processing apparatus, the method comprising:

• storing readable apparatus type information for identifying a type of the substrate processing apparatus in relation to apparatus information used to identify the substrate processing apparatus for a case where an abnormal state occurs at the substrate processing apparatus, and readable check item information for specifying a check item necessary for analyzing a cause of the abnormal state in relation to the apparatus type information and abnormal state information for identifying an abnormal state occurring when the recipe is executed;
• and
• receiving basic information comprising the abnormal state information and the apparatus information, extracting check item information relating to the apparatus information by referring to the storage unit, and preparing a check item table comprising the extracted check item information.