Manufacturing method for a micromechanical component and micromechanical component

A method for manufacturing a sensor device, the method comprising:

• manufacturing a micromechanical component having a displaceable mass as a sensitive element of the sensor device by performing the following:
• at least partially covering a first side of a substrate using a first insulating layer,
• applying at least one first conductive material to the first insulating layer and forming at least one actuator plate electrode, at least one contact terminal, and at least one spring component from at least the first conductive material, one of the actuator plate electrodes being connected in each case to the assigned contact terminal via the assigned spring component,
• covering at least the at least one actuator plate electrode, the at least one contact terminal, and the at least one spring component using a second insulating layer,
• applying at least one second conductive material to the second insulating layer and forming at least one stator plate electrode from at least the second conductive material,
• forming at least one first trench in the substrate, a displaceable mass and a frame, which at least partially encloses the displaceable mass, of a mounting being structured from the substrate using the at least one first trench, and the displaceable mass being connected to the mounting via the at least one spring component, etching being performed in a first direction from a second side, which is diametrically opposite to the first side, to the first side of the substrate, and
• removing at least one partial mass of the second insulating layer between the at least one actuator plate electrode and the at least one stator plate electrode, etching being performed in a second direction, which is opposite to the first direction;
• and
• manufacturing an analysis unit, which is configured so that during operation of the sensor device, a sensor variable with respect to a voltage signal, which is applied between the at least one stator plate electrode and the at least one actuator plate electrode, is detected with the aid of the analysis unit and information with respect to a displacement movement of the displaceable mass in relation to the mounting is established, taking into account the sensor variable.

A micromechanical component, comprising:

• a displaceable mass made of a substrate material having at least one actuator plate electrode and one first insulating layer between the displaceable mass and the at least one actuator plate electrode;
• a mounting having a frame, which at least partially encloses the displaceable mass, at least one contact terminal of the at least one actuator plate electrode, and at least one stator plate electrode;
• and
• at least one spring component, via which the displaceable mass is connected to the mounting, one of the actuator plate electrodes being connected to the assigned contact terminal in each case via the assigned spring component;
• wherein the frame of the mounting is made of the substrate material of the displaceable mass, and
• wherein one of the actuator plate electrodes is configured in one piece with the assigned contact terminal and the assigned spring component in each case.

A sensor device, comprising:

• a micromechanical component having a displaceable mass as a sensitive element of the sensor device;
• and
• a displaceable mass made of a substrate material having at least one actuator plate electrode and one first insulating layer between the displaceable mass and the at least one actuator plate electrode;
• a mounting having a frame, which at least partially encloses the displaceable mass, at least one contact terminal of the at least one actuator plate electrode, and at least one stator plate electrode;
• and
• at least one spring component, via which the displaceable mass is connected to the mounting, one of the actuator plate electrodes being connected to the assigned contact terminal in each case via the assigned spring component;
• wherein the frame of the mounting is made of the substrate material of the displaceable mass, and
• wherein one of the actuator plate electrodes is configured in one piece with the assigned contact terminal and the assigned spring component in each case;
• and
• an analysis unit, which is configured so that a sensor variable with respect to a voltage signal, which is applied between the at least one stator plate electrode and the at least one actuator plate electrode, is detectable with the aid of the analysis unit and information with respect to a displacement movement of the displaceable mass in relation to the mounting may be established, taking into account the sensor variable.