Yaw rate sensor, yaw rate sensor system, and method for operating a yaw rate sensor

A yaw rate sensor system, comprising:

• at least two yaw rate sensors, each of the at least two yaw rate sensors including:
• a substrate, which has a main plane of extension,
• a detection arrangement, and
• a Coriolis element, wherein the Coriolis element is excitable to a vibration along a third direction, which is perpendicular to the main plane of extension, wherein a Coriolis deflection of the Coriolis element along a first direction, which is parallel to the main plane of extension, is detectable using the detection arrangement;
• wherein the detection arrangement includes a Coriolis electrode, which is connected to the Coriolis element, and a corresponding counterelectrode, wherein the Coriolis electrode and the counterelectrode are excitable to a vibration along the third direction, and
• wherein at least one of the following is satisfied:
• (i) a first Coriolis element of a first yaw rate sensor is coupled to a second Coriolis element of a second yaw rate sensor, and (ii) a first drive frame of the first yaw rate sensor is coupled to a second drive frame of the second yaw rate sensor.

A method for operating a yaw rate sensor, the method comprising:

• exciting a Coriolis element of the yaw rate sensor to a vibration along a third direction, which is perpendicular to a main plane of extension of a substrate, wherein the yaw rate sensor includes the substrate, which has the main plane of extension, a detection arrangement, and the Coriolis element, wherein the Coriolis element is excitable to a vibration along the third direction, and wherein the detection arrangement includes a Coriolis electrode, which is connected to the Coriolis element, and a corresponding counterelectrode;
• and
• detecting the Coriolis deflection of the Coriolis element along the first direction, which is parallel to the main plane of extension, using the detection arrangement;
• wherein the Coriolis electrode of the detection arrangement and the counterelectrode of the detection arrangement are excited to a vibration along the third direction.