Substrate processing apparatus

A substrate processing apparatus comprising:

• a substrate loading block including a container placing unit in which a substrate carrying container storing at least a substrate is disposed and a transfer mechanism to transfer the substrate with respect to the substrate carrying container disposed on the container placing unit;
• a first processing block, a second processing block, and a third processing block disposed in order from the side of the substrate loading block′, each of which is a processing block including a plurality of processing units to perform processing on the substrate and a substrate carrying mechanism to transfer the substrate with respect to the processing units;
• a first transfer stage to transfer the substrate from the transfer mechanism to the first processing block;
• a first direct carrying mechanism to directly carry the substrate taken from the transfer mechanism to the second processing block;
• and
• a second direct carrying mechanism to directly carry the substrate taken from the transfer mechanism to the third processing block.