Low-profile surface mount filter
AssigneeEntegris, Inc.
InventorsAnthony DiPrizio, Nathan Abbott, Christopher Vroman, Rajnikant B. Patel, Eric McNamara
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AssigneeEntegris, Inc.
InventorsAnthony DiPrizio, Nathan Abbott, Christopher Vroman, Rajnikant B. Patel, Eric McNamara
Estimating the term…
Embodiments of the present invention provide low-profile surface mount filters. One embodiment of the present invention includes a filter housing adapted to mount on a substrate block having a plurality of flow paths and a filter cavity defined therein. The filter cavity is defined to extend in a generally horizontal direction when the low-profile filter is in use. A first flow passage is defined to connect an inlet of the filter housing to a first section of the filter cavity and a second flow passage is defined to connect a second section of the filter cavity to an outlet of the filter housing. A filter assembly is disposed in the filter cavity and sealed to the surface of the filter cavity separating the filter cavity into adjacent sections including the first section of the filter cavity and second section of the filter cavity.
A method of making a low-profile filter comprising:
Dependencies are inferred from the claim text.