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US 2011/0074053 A1Published application
Humidifying apparatus, lithographic apparatus and humidifying method
AssigneeASML Netherlands B.V.
InventorAntonius Johannus VAN DER NET
Life of this patent
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Abstract
A humidifying apparatus is disclosed in which gas is provided to a first side of a membrane and liquid to a second side of the same membrane. The membrane is non-porous to the liquid but porous to vapour of the liquid and is liquidphilic to said liquid.
Claims20
-29. (canceled)
A method comprising:
- controlling the temperature of a liquid and providing that liquid to one side of a membrane;
- providing gas to be humidified to the other side of the membrane;
- and
- humidifying the gas using the liquid via the membrane,
- wherein the temperature of gas on the other side of the membrane is controlled by the temperature of liquid on the one side of the membrane.
2 more elements
An apparatus comprising:
- a membrane;
- a liquid temperature conditioner to condition the temperature of a liquid;
- a first conduit to guide the liquid from the liquid temperature conditioner to one side of the membrane;
- a second conduit to guide gas to be humidified via the membrane to the other side of the membrane;
- and
- a controller to control the temperature of the gas by controlling the liquid temperature conditioner to control the temperature of the liquid.
3 more elements
An apparatus comprising:
- a membrane;
- a first conduit to guide the liquid from the liquid temperature conditioner to one side of the membrane;
- a second conduit to guide gas to be humidified via the membrane to the other side of the membrane;
- and
- a pre-humidifier to pre-humidify the gas upstream of the first conduit.
2 more elements
Dependencies are inferred from the claim text.