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US 2011/0071775 A1Published application
Pressure measurement using a mems device
AssigneeQUALCOMM MEMS Technologies, Inc.
InventorKasra Khazeni
Life of this patent
Estimating the term…
Abstract
A device to measure pressure is disclosed. In one embodiment, the device includes at least one element with two layers separated by a space which changes over a variable time period in response to a voltage applied across the two layers. The time period may be measured and is indicative of the ambient pressure about the device.
Claims40
A device for measuring pressure comprising:
- at least one element comprising two layers separated by a space, wherein a dimension of the space changes in response to an applied stimulus;
- and
- a processor configured to determine a time period over which the dimension of the space changes from a first dimension to a second dimension, and determine, based on the determined time period, an ambient pressure about the device.
A method of measuring pressure comprising:
- applying a stimulus to an element comprising two layers separated by a space, wherein a dimension of the space changes in response to the stimulus;
- determining a time period over which the dimension of the space changes from a first dimension to a second dimension;
- and
- determining, based on the determined time period, an ambient pressure about the element.
1 more element
A system for measuring pressure comprising:
- means for applying a stimulus to an element comprising two layers separated by a space, wherein a dimension of the space changes in response to the stimulus;
- means for determining a time period over which the dimension of the space changes from a first dimension to a second dimension;
- and
- means for determining, based on the determined time period, an ambient pressure about the element.
1 more element
A non-transitory computer-readable storage medium comprising instructions which, when executed by an apparatus, cause the apparatus to:
- apply a stimulus to an element comprising two layers separated by a space, wherein a dimension of the space changes in response to the stimulus;
- determine a time period over which the dimension of the space changes from a first dimension to a second dimension;
- and
- determine, based on the determined time period, an ambient pressure about the element.
1 more element
Dependencies are inferred from the claim text.