Mems resonator
AssigneeNXP B.V.
InventorPeter G. Steeneken
Life of this patent
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Abstract
A micro-electromechanical resonator comprising a material having anisotropic directional elasticity characteristics. A shape of the resonator is such that a first distance in a first direction from a centroid of the resonator to a first point on a peripheral edge of the resonator is greater than a second distance in a second direction from the centroid to a second different point on the edge. This is true for every first direction and every second direction wherein the material has a lesser modulus of elasticity in the first direction than the second direction.
Claims12
A micro-electromechanical resonator comprising:
- a material having anisotropic directional elasticity characteristics, wherein
- a shape of the resonator is such that a first distance in a first direction from a centroid of the resonator to a first point on a peripheral edge of the resonator is greater than a second distance in a second direction from the centroid to a second different point on the edge, and
- for every first direction and every second direction wherein the material has a lesser modulus of elasticity in the first direction than the second direction.
A method of manufacturing a micro-electromechanical resonator, the resonator including a material having anisotropic directional elasticity characteristics, the method comprising:
- selecting a shape of the resonator such that a first distance in a first direction from a centroid of the resonator to a first point on a peripheral edge of the resonator is greater than a second distance in a second direction from the centroid to a second different point on the edge
- for every first direction and every second direction wherein the material has a lesser modulus of elasticity in the first direction than the second direction;
- and
- producing the resonator having the selected shape.
Dependencies are inferred from the claim text.