Electron emission element
AssigneeKabushiki Kaisha Toshiba
InventorsMariko Suzuki, Tadashi Sakai, Naoshi Sakuma, Masayuki Katagiri, Yuichi Yamazaki
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Abstract
According to the embodiment, an electron emission element includes a conductive substrate, a first diamond layer of a first conductivity type formed on the conductive substrate, and a second diamond layer of the first conductivity type formed on the first diamond layer. Thereby, it becomes possible to provide the electron emission element having a high electron emission amount and a high current density even in a low electric field at low temperature and the electron emission apparatus using this electron emission element.
Claims14
An electron emission element comprising:
- a conductive substrate;
- a first diamond layer of a first conductivity type formed on the conductive substrate;
- and
- a second diamond layer of the first conductivity type formed on the first diamond layer.
An electron emission element comprising:
- a conductive substrate having a first main surface and a second main surface;
- a first diamond layer of a first conductivity type formed on the first main surface of the conductive layer;
- a second diamond layer of the first conductivity type selectively formed on the first diamond layer;
- a first electrode formed on a region of the first diamond layer different from a region where the second diamond layer is formed;
- and
- a second electrode formed on the second main surface of the conductive substrate.
An electron emission apparatus comprising:
- a hermetic envelope;
- a cathode provided in the hermetic envelope;
- an electron emission element which comprises:
- a conducive substrate mounted on the cathode;
- a first diamond layer of a first conductivity type formed on the conductive substrate;
- and a second diamond layer of the first conductivity type formed on the first diamond layer;
- and
- an anode provided in the hermetic envelope to face the second diamond layer.
An electron emission apparatus comprising:
- a hermetic envelope;
- a cathode provided in the hermetic envelope;
- an electron emission element which comprises:
- a conductive substrate which has a first main surface and a second main surface and is mounted on the cathode so that electrical conduction is achieved between the second main surface and the cathode electrode;
- a first diamond layer of a first conductivity type formed on the first main surface of the conductive substrate;
- a second diamond layer of the first conductivity type selectively formed on the first diamond layer;
- and an energizing electrode formed on a region of the first diamond layer different from a region where the second diamond layer is formed;
- and
- an anode provided in the hermetic envelope to face the second diamond layer.
Dependencies are inferred from the claim text.