Portable wireless sensor
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsHsu-Shui Liu, Yeh-Chieh Wang, Jiun-Rong Pai
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Abstract
The present disclosure provides an apparatus for fabricating a semiconductor device. The apparatus includes a portable device. The portable device includes first and second sensors that respectively measure first and second fabrication process parameters. The first fabrication process parameter is different from the second fabrication process parameter. The portable device also includes a wireless transceiver that is coupled to the first and second sensors. The wireless transceiver receives the first and second fabrication process parameters and transmits wireless signals containing the first and second fabrication process parameters.
Claims20
An apparatus for fabricating a semiconductor device, the apparatus comprising a portable device that includes:
- first and second sensors that respectively measure first and second fabrication process parameters, the first fabrication process parameter being different from the second fabrication process parameter;
- and
- a wireless transceiver that is coupled to the first and second sensors, the wireless transceiver receiving the first and second fabrication process parameters and transmitting wireless signals containing the first and second fabrication process parameters.
An apparatus for fabricating a semiconductor device, the apparatus comprising a portable device that includes:
- first and second sensors that measure first and second processing data in an analog form;
- a signal converter that converts the first and second processing data from the analog form into a digital form;
- a micro-controller that modulates the measured first and second processing data using a predetermined modulation scheme;
- and
- a wireless transceiver that transmits wireless signals containing the modulated first and second processing data.
A method of fabricating a semiconductor device, comprising:
- measuring a first fabrication process parameter using a first sensor;
- measuring a second fabrication process parameter using a second sensor, the second fabrication process parameter being different from the first fabrication process parameter;
- and
- transmitting wireless signals containing the measured first and second fabrication process parameters using a wireless transceiver;
- and
- configuring the wireless transceiver and the first and second sensors so that the wireless transceiver and the first and second sensors are integrated into a single portable device.
Dependencies are inferred from the claim text.