Information processing apparatus, semiconductor manufacturing system, information processing method, and storage medium

An information processing apparatus for processing a state value, which is a value relating to a state during a treatment, performed by a semiconductor manufacturing apparatus for performing a treatment on a treatment target containing a semiconductor, comprising:

• a state value receiving portion that receives the multiple state values in different measurement units;
• a standard value storage portion in which a standard value, which is a value serving as standard for the state value, can be stored;
• a threshold value storage portion in which a threshold value, which is a value used for judging whether or not the state value is a desired value, can be stored;
• a calculating portion that calculates, for each of the multiple state values in different measurement units, a ratio between a value relating to a difference between the state value received by the state value receiving portion and the standard value, and a value relating to a difference between the threshold value and the standard value;
• a multivariate analysis portion that performs multivariate analysis, using the multiple ratios calculated by the calculating portion;
• and
• an output portion that outputs a result of analysis performed by the multivariate analysis portion.

An information processing method for processing a state value, which is a value relating to a state during a treatment, performed by a semiconductor manufacturing apparatus for performing a treatment on a treatment target containing a semiconductor, comprising;

• a state value receiving step of receiving the state value;
• a calculating step of calculating a ratio between a value relating to a difference between the state value received in the state value receiving step and a stored standard value serving as standard for the state value, and a value relating to a difference between a stored threshold value used for judging whether or not the state value is a desired value, and the standard value;
• and
• an output step of outputting the ratio calculated in the calculating step.

An information processing method for processing a state value, which is a value relating to a state during a treatment, performed by a semiconductor manufacturing apparatus for performing a treatment on a treatment target containing a semiconductor, comprising;

• a state value receiving step of receiving the multiple state values in different measurement units;
• a calculating step of calculating, for each of the multiple state values in different measurement units, a ratio between a value relating to a difference between the state value received in the state value receiving step and a stored standard value serving as standard for the state value, and a value relating to a difference between a stored threshold value used for judging whether or not the state value is a desired value, and the standard value;
• a multivariate analysis step of performing multivariate analysis, using the multiple ratios calculated in the calculating step;
• and
• an output step of outputting a result of analysis performed in the multivariate analysis step.

A non-transitory computer-readable storage medium having a program for causing a computer to process a state value, which is a value relating to a state during a treatment, performed by a semiconductor manufacturing apparatus for performing a treatment on a treatment target containing a semiconductor,

• wherein the program causes the computer to execute:
• a state value receiving step of receiving the state value;
• a calculating step of calculating a ratio between a value relating to a difference between the state value received in the state value receiving step and a stored standard value serving as standard for the state value, and a value relating to a difference between a stored threshold value used for judging whether or not the state value is a desired value, and the standard value;
• and
• an output step of outputting the ratio calculated in the calculating step.

A non-transitory computer-readable storage medium having a program for causing a computer to process a state value, which is a value relating to a state during a treatment, performed by a semiconductor manufacturing apparatus for performing a treatment on a treatment target containing a semiconductor,

• wherein the program causes the computer to execute:
• a state value receiving step of receiving the multiple state values in different measurement units;
• a calculating step of calculating, for each of the multiple state values in different measurement units, a ratio between a value relating to a difference between the state value received in the state value receiving step and a stored standard value serving as standard for the state value, and a value relating to a difference between a stored threshold value used for judging whether or not the state value is a desired value, and the standard value;
• a multivariate analysis step of performing multivariate analysis, using the multiple ratios calculated in the calculating step;
• and
• an output step of outputting a result of analysis performed in the multivariate analysis step.