Method for manufacturing a micropump and micropump
AssigneeRobert Bosch GmbH
InventorsJulia Cassemeyer, Michael Stumber, Franz Laermer, Ralf Reichenbach
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Abstract
A method for manufacturing a micropump, which may be for the metered delivery of insulin, multiple layers being situated on the front side of a first carrier layer, which has a front side and a rear side, and microfluidic functional elements being formed by structuring at least one of the layers. It is provided that the structuring of the at least one layer for manufacturing all microfluidic functional elements is exclusively performed by front side structuring. Furthermore, a micropump is disclosed.
Claims34
1-23. (canceled)
A method for manufacturing a micropump, the method comprising:
- providing multiple layers on a front side of a first carrier layer, which has a front side and a rear side;
- and
- forming microfluidic functional elements by structuring at least one of the layers, wherein the structuring of the at least one layer for manufacturing all microfluidic functional elements is exclusively performed by front side structuring.
A micropump, comprising:
- multiple layers on a front side of a first carrier layer, which has a front side and a rear side;
- and
- microfluidic functional elements, which are formed by structuring at least one of the layers, wherein the structuring of the at least one layer for manufacturing all microfluidic functional elements is exclusively performed by structuring from one direction.
Dependencies are inferred from the claim text.